A90 高性能采用HID氦离子检测器，自动阀切换，可靠性好精确度高 高纯氦气，氢气，氩气，氮气，氧气分析技术方案

测定成分和测定范围：

  H2                            25ppb~100ppm

  O2/AR                        30ppb~100ppm

  N2                             25ppb~100ppm

  CH4                           20ppb~100ppm

  CO                            30ppb~100ppm

  CO2                          20ppb~100ppm